Microstructure evolution of Ti3SiC2 compound cathodes during reactive cathodic arc evaporation
نویسندگان
چکیده
منابع مشابه
Microstructure evolution of Ti3SiC2 compound cathodes during reactive cathodic arc evaporation
The microstructure evolution and compositional variation of Ti3SiC2 cathode surfaces during reactive cathodic arc evaporation are presented for different process conditions. The results show that phase decomposition takes place in the near-surface region, resulting in a 5–50 m thick converted layer that is affected by the presence of nitrogen in the deposition chamber. This layer consists of tw...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
سال: 2011
ISSN: 0734-2101,1520-8559
DOI: 10.1116/1.3569052